Electric resistance heating devices – Heating devices – Radiant heater
Patent
1998-02-27
2000-01-18
Leung, Philip H.
Electric resistance heating devices
Heating devices
Radiant heater
219405, 219411, 392424, A21B 200
Patent
active
060163836
ABSTRACT:
A rapid thermal heating apparatus including an infrared camera located outside an evacuable chamber to sense infrared radiation emitted from different regions of a substrate.
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Gibbons James F.
Gronet Christian M.
Applied Materials Inc.
Leung Philip H.
Patel Vinod D.
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