Illumination – Light source and modifier – With ventilating – cooling or heat insulating means
Patent
1992-05-13
1994-05-31
Husar, Stephen F.
Illumination
Light source and modifier
With ventilating, cooling or heat insulating means
362264, 313 46, F21V 2900
Patent
active
053174925
ABSTRACT:
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
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Gibbons James F.
Gronet Christian M.
Applied Materials Inc.
Husar Stephen F.
Morris Birgit E.
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