Rapid thermal heating apparatus and method

Illumination – Light source and modifier – With ventilating – cooling or heat insulating means

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362264, 313 46, F21V 2900

Patent

active

053174925

ABSTRACT:
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

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