Rapid thermal heating apparatus and method

Details Rapid thermal heating apparatus and method Rapid thermal heating apparatus and method

1996-10-16

1998-04-28

Bennett, G. Bradley

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

374137, G01J 506

Patent

active

057436436

ABSTRACT:
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

REFERENCES:
patent: 2057776 (1936-10-01), Groven
patent: 2318533 (1943-12-01), Selvig
patent: 3623712 (1971-11-01), McNeilly et al.
patent: 3761678 (1973-09-01), Eckles
patent: 3836751 (1974-09-01), Anderson
patent: 3862397 (1975-01-01), Anderson et al.
patent: 3936686 (1976-02-01), Moore
patent: 4047496 (1977-09-01), McNeilly et al.
patent: 4081313 (1978-03-01), McNeilly et al.
patent: 4101759 (1978-07-01), Anthony et al.
patent: 4232360 (1980-11-01), Vakil et al.
patent: 4270260 (1981-06-01), Krueger
patent: 4378956 (1983-04-01), Lester
patent: 4389970 (1983-06-01), Edgerton
patent: 4411619 (1983-10-01), Darnell et al.
patent: 4448000 (1984-05-01), Manuccia et al.
patent: 4470369 (1984-09-01), Edgerton
patent: 4489234 (1984-12-01), Harnden, Jr. et al.
patent: 4510555 (1985-04-01), Mori
patent: 4550684 (1985-11-01), Mahawili
patent: 4558660 (1985-12-01), Nishizawa et al.
patent: 4640224 (1987-02-01), Bunch et al.
patent: 4649261 (1987-03-01), Sheets
patent: 4680447 (1987-07-01), Mahawili
patent: 4680451 (1987-07-01), Gat et al.
patent: 4694143 (1987-09-01), Nishimura et al.
patent: 4698486 (1987-10-01), Sheets
patent: 4761538 (1988-08-01), Chiba et al.
patent: 4789771 (1988-12-01), Robinson et al.
patent: 4796562 (1989-01-01), Brors et al.
patent: 4832777 (1989-05-01), Davis et al.
patent: 4836138 (1989-06-01), Robinson et al.
patent: 4854263 (1989-08-01), Chang et al.
patent: 4859832 (1989-08-01), Uehara et al.
patent: 4886954 (1989-12-01), Yu et al.
patent: 4891499 (1990-01-01), Moslehi
patent: 4919542 (1990-04-01), Nulman et al.
patent: 4924073 (1990-05-01), Chiba
patent: 4956538 (1990-09-01), Moslehi
patent: 4975561 (1990-12-01), Robinson et al.
patent: 5052816 (1991-10-01), Nakamura et al.
patent: 5069005 (1991-12-01), Hovland et al.
patent: 5114242 (1992-05-01), Gat et al.
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5156820 (1992-10-01), Wong et al.
patent: 5226732 (1993-07-01), Nakos et al.
patent: 5317492 (1994-05-01), Gronet et al.
patent: 5326171 (1994-07-01), Thompson et al.
patent: 5452396 (1995-09-01), Sopori
patent: 5487127 (1996-01-01), Gronet et al.
patent: 5508934 (1996-04-01), Moslehi et al.
Hodul et al., "Measurement of Dynamic Temperature Uniformity in Rapid Thermal Processing," Solid State Technology, May 1988, pp. 209-211.
Akiyama et al., "Critical Radial Temp. Gradient Inducing Slip Dislocations in Silicon Epitaxy Using Dual Heating of the Two Surfaces of a Wafer," Japan. Jour. of Applied Phys., V. 25, No. 11, Nov. 1986, pp. 1619-1622.

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