Rapid thermal heating apparatus and method

Details Rapid thermal heating apparatus and method Rapid thermal heating apparatus and method

1991-10-24

1992-10-13

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219390, 219405, 392424, H05B 362, F27D 1102, F27B 514

Patent

active

051553368

ABSTRACT:
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

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