Rapid thermal heating apparatus and method

Details Rapid thermal heating apparatus and method Rapid thermal heating apparatus and method

1997-09-03

2000-09-19

Walberg, Teresa

Electric resistance heating devices

Heating devices

Radiant heater

219390, A21B 200, F27B 514

Patent

active

061224391

ABSTRACT:
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

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