Rapid thermal heating apparatus and control therefor

Details Rapid thermal heating apparatus and control therefor Rapid thermal heating apparatus and control therefor

1995-07-31

1997-11-18

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Radiant heater

219405, 219411, 118725, H05B 340, C23C 1600, H01L 2100

Patent

active

056896140

ABSTRACT:
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.

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