Coating processes – With post-treatment of coating or coating material – Solvent vapor treatment of coating
Patent
1996-11-14
1998-05-19
Lusignan, Michael
Coating processes
With post-treatment of coating or coating material
Solvent vapor treatment of coating
427245, 427246, 427377, 427378, 438795, 438909, B05D 304, B05D 300, B05D 500, H01L 2100
Patent
active
057533059
ABSTRACT:
This invention pertains generally to aging methods suited to aerogel thin film fabrication, and particularly to techniques for improving gel strength and/or aerogel dielectric constant by a rapid aging technique, which avoid damage or premature drying of wet gel thin films during aging. A substrate having a wet gel thin film deposited thereon is contacted with a saturated water vapor atmosphere, preferably at an elevated pressure and a temperature greater than 100.degree. C. The method may comprise a vapor-phase exchange step to remove low boiling point pore liquids such as ethanol prior to or during aging. The method may also comprise a vapor-phase exchange step to replace water in the wet gel with another pore liquid such as acetone to stop the aging process and prepare the wet gel for drying. A vapor-phase aging catalyst (e.g. ammonia) may also be used to enhance the aging process. The present invention allows aging of wet gel thin films to be completed in a few minutes instead of the days generally required for conventional bulk gel aging.
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Ackerman William C.
Jeng Shin-Puu
Johnston Gregory P.
Smith Douglas M.
Barr Michael
Donaldson Richard L.
Harris James E.
Kesterson James C.
Lusignan Michael
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