Ramping susceptor-wafer temperature using a single temperature i

Details Ramping susceptor-wafer temperature using a single temperature i Ramping susceptor-wafer temperature using a single temperature i

1995-12-11

1998-09-15

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Radiant heater

118725, 118728, 364557, 427557, 219390, G01J 528, H01L 2166, F27B 126, F27D 1900

Patent

active

058092110

ABSTRACT:
A method and apparatus for uniformly ramping the temperatures of a wafer and a susceptor using a first heat source primarily directed at the wafer and a second heat source primarily directed at the susceptor while keeping the wafer at approximately the same temperature as the susceptor but measuring only the temperature of the susceptor. The method comprises the steps of: determining and storing a plurality of steady-state temperatures of the susceptor as a function of the total power provided to the first heat source and the second heat source; ramping the susceptor from an initial temperature to a final temperature; and heating the wafer from the initial temperature to the final temperature, wherein the power to the first heat source is determined from the susceptor's temperature and the plurality of steady-state temperatures of the wafer and susceptor as a function of total power.

REFERENCES:
patent: 3836751 (1974-09-01), Anderson
patent: 4680451 (1987-07-01), Gat et al.
patent: 4982693 (1991-01-01), Ebata
patent: 5098198 (1992-03-01), Nulman et al.
patent: 5155337 (1992-10-01), Sorrell et al.
patent: 5359693 (1994-10-01), Nenyei et al.
patent: 5446825 (1995-08-01), Moslehi et al.
patent: 5561612 (1996-10-01), Thakur

Affiliated with

Also associated with

Rating

Ramping susceptor-wafer temperature using a single temperature i does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ramping susceptor-wafer temperature using a single temperature i, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ramping susceptor-wafer temperature using a single temperature i will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-97781