4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

Harold J. Mellen, III

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Adaptive temperture controller and method of operation

Electric heating – Heating devices – With power supply and voltage or current regulation or...
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Purged lower liner

Etching a substrate: processes – Gas phase etching of substrate
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Ramping susceptor-wafer temperature using a single temperature i

Electric resistance heating devices – Heating devices – Radiant heater
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Profile ID: LFUS-PAI-P-210822

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