Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1994-12-23
1996-09-17
Lesmes, George F.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430192, 430910, 430921, G03C 173
Patent
active
055567347
ABSTRACT:
A radiation sensitive resin composition which comprises (A) a copolymer represented by the following general formula and (B) a radiation sensitive acid generator and, if necessary, (C) an alkali-soluble resin: ##STR1## wherein R represents a hydrogen atom or a methyl group and m and n are integers representing the numbers of the respective recurring units and satisfying the relations 0.1.gtoreq.m/(m+n)<0.6 and 0.4<n/(m+n).ltoreq.0.9. Said radiation sensitive resin composition is excellent in resolution and pattern profile and also excellent in sensitivity and developability and is useful as a chemically amplified resist good in contrast and heat resistance.
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Database WPI, Derwent Publications, AN-93-177961, JP-5-107757, Apr. 30, 1993.
Kobayashi Eiichi
Ota Toshiyuki
Tsuji Akira
Yamachika Mikio
Japan Synthetic Rubber Co. Ltd.
Lesmes George F.
Weiner Laura
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