Radiation sensitive resin composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430 18, 430313, 430314, 430315, 430318, 430935, 522 63, 522110, G03F 7038, G03F 7004, G03F 716, G03F 740

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06048666&

ABSTRACT:
A radiation sensitive resin composition comprising an alkali-soluble resin such as a polyvinyl phenol or a phenol resin other than a polyvinyl phenol having a weight average molecular weight of 2,000 or higher, a cross-linking agent such as an amino resin having two or more active methylol groups in a molecule, a particulate rubbery material comprising a cross-linked polymer chemically modified with an epoxy compound, a liquid rubbery material having a number average molecular weight between 1,000 and 10,000 and a glass transition temperature of -20.degree. C. or lower, and a radiation polymerization initiator. The composition is best suited for use as a material for preparing an insulating layer interposed between two layers of conductive wiring that are arranged in an overlaying stack.

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patent: 5688598 (1997-11-01), Keck et al.
patent: 5830621 (1998-11-01), Suzuki et al.
Elf-altochem from http:///www.Elf-atochem.com
ew elf/functional/polybd.html. 2 pages Jul. 13, 1999.

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