Radiation-sensitive mixture and its use

Details Radiation-sensitive mixture and its use Radiation-sensitive mixture and its use

1999-04-26

2000-05-16

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430325, 430326, 430330, G03F 7038, G03F 7033

Patent

active

060635436

ABSTRACT:
A radiation-sensitive mixture contains the following components:

REFERENCES:
patent: 4491628 (1985-01-01), Ito et al.
patent: 5234794 (1993-08-01), Sebald et al.
patent: 5346803 (1994-09-01), Crivello et al.
patent: 5856071 (1999-01-01), Kotachi et al.
Alexander M. Vekselman et al.: "Completely Water-Processable and Other Chemically Amplified Resists From Maleic Anhydride Copolymers", in SPIE vol. 2724, pp. 296-307.

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