4. Radiation imagery chemistry: process, composition, or product th
  5. Color imaging process
  6. Using identified radiation sensitive composition in the...

Michael Sebald

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Amplification of resist structures of fluorinated resist...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Apparatus and method for proof of outgassing products

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Bottom resist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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CHEMICALLY AMPLIFIED PHOTORESIST AND PROCESS FOR STRUCTURING...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Copolymers

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
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Profile ID: LFUS-PAI-P-56445

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