Radiation exposure apparatus comprising a gas flushing system

Details Radiation exposure apparatus comprising a gas flushing system Radiation exposure apparatus comprising a gas flushing system

2005-12-06

2009-08-04

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

07570342

ABSTRACT:
An exposure apparatus is provided with a radiation source, a patterning structure, a projection system, a substrate, and a gas flushing system for removing gas from an area between the projection system and the substrate.

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