Surface inspection method and surface inspection apparatus

Details Surface inspection method and surface inspection apparatus Surface inspection method and surface inspection apparatus

2007-07-06

2009-11-10

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S239700, C356S239800, C356S237200

Reexamination Certificate

active

07616299

ABSTRACT:
When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.

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