Proximity effect correction apparatus, proximity effect...

Details Proximity effect correction apparatus, proximity effect... Proximity effect correction apparatus, proximity effect...

2006-05-16

2006-05-16

Thompson, A. M. (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C430S005000, C430S030000, C382S144000

Reexamination Certificate

active

07047516

ABSTRACT:
Light intensity values only of the vicinity of a specified portion, that is, for example, based on a prescribed value, an area where the distance between edges of an object to be corrected is equal to or shorter than the prescribed value are calculated, and the object to be corrected is corrected based on the light intensity values.

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patent: 02000049072 (2000-02-01), None

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