Protective collar for vacuum seal in a plasma etch reactor

Details Protective collar for vacuum seal in a plasma etch reactor Protective collar for vacuum seal in a plasma etch reactor

1994-04-29

1998-03-03

Cummings, Scott

Seal for a joint or juncture

Seal between relatively movable parts

Relatively rotatable radially extending sealing face member

277181, 118723E, F16J 1510

Patent

active

057226687

ABSTRACT:
A vacuum seal assembly that can be used in a plasma etch reactor to seal the chamber interior from the outside environment consists of a protective collar that is injection molded or machined of a high strength, high temperature and corrosion resistant thermoplastic material, the collar has an elastomeric gasket installed therein and is used in combination with a second elastomeric gasket to achieve a fluid-tight seal between two rigid surfaces made of silicon and quartz, respectively.

REFERENCES:
patent: 3512789 (1970-05-01), Tanner
patent: 4095809 (1978-06-01), Smith
patent: 5240556 (1993-08-01), Ishikawa et al.
patent: 5518257 (1996-05-01), Breaker

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