Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-01-30
2007-01-30
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000, C359S494010, C250S330000
Reexamination Certificate
active
11101235
ABSTRACT:
A projection exposure apparatus for microlithography has a light source, an illumination system, a mask-positioning system and a projection lens. The latter has a system aperture plane and an image plane and contains at least one lens that is made of a material which has a birefringence dependent on the transmission angle. The exposure apparatus further has an optical element, which has a position-dependent polarization-rotating effect or a position-dependent birefringence. This element, which is provided close to a pupil plane of the projection exposure apparatus, compensates at least partially for the birefringent effects produced in the image plane by the at least one lens.
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Brunotte Martin
Hartmaier Jürgen
Holderer Hubert
Kaiser Winfried
Kohl Alexander
Carl Zeiss SMT AG
Fish & Richardson P.C.
Rutledge D.
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