4. Optical: systems and elements
  5. Lens
  6. With support

Jürgen Hartmaier

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Holding device for an optical element made of a crystalline...

Optical: systems and elements – Lens – With support
Reexamination Certificate

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Projection lens and microlithographic projection exposure...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Projection lens and microlithographic projection exposure...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2679796

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