4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Yuichiro Yamazaki

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Charged beam apparatus having cleaning function and method of cl

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Charged beam drawing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged beam exposure method

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate

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Charged beam exposure method and charged beam exposure...

Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate

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Charged particle beam exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-301812

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