Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1983-08-02
1986-07-01
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
355 68, G03B 2774, G03B 2780
Patent
active
045981973
ABSTRACT:
A projection aligner wherein light from a light source is passed through a mask so as to focus an image of a pattern of the mask on a wafer, characterized in that at least one sensor for monitoring a luminosity and a distribution thereof is disposed in an optical path between the light source and the mask, whereby a luminosity and a distribution thereof on the wafer can be controlled to proper values. The projection aligner is effective for application to minute processing technologies for the production of semiconductor devices, etc.
REFERENCES:
patent: 3422442 (1969-01-01), Glendinning et al.
patent: 4161363 (1979-07-01), Kahle
Asakawa Terushige
Hoshi Tai
Morita Koyo
Nishizuka Hiroshi
Nomura Keizo
Brophy J. Jon
Hitachi , Ltd.
Hitachi Ome Electronic Co., Ltd.
Nelms David C.
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