Productivity enhancing thermal sprayed yttria-containing...

Details Productivity enhancing thermal sprayed yttria-containing... Productivity enhancing thermal sprayed yttria-containing...

2007-11-27

2007-11-27

Kackar, Ram N. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C156S345520, C156S345530, C118S724000, C118S725000, C118S726000, C204S298010, C216S067000

Reexamination Certificate

active

11000894

ABSTRACT:
Components of semiconductor processing apparatus comprise thermal sprayed yttria-containing coatings that provide erosion, corrosion and/or corrosion-erosion resistance in plasma atmospheres. The coatings can protect substrates from physical and/or chemical attack.

REFERENCES:
patent: 4340462 (1982-07-01), Koch
patent: 4948458 (1990-08-01), Ogle
patent: 5200232 (1993-04-01), Tappan et al.
patent: 5262029 (1993-11-01), Erskine et al.
patent: 5788799 (1998-08-01), Steger et al.
patent: 5798016 (1998-08-01), Oehrlein et al.
patent: 5820723 (1998-10-01), Benjamin et al.
patent: 5824605 (1998-10-01), Chen et al.
patent: 5838529 (1998-11-01), Shufflebotham et al.
patent: 5863376 (1999-01-01), Wicker et al.
patent: 5911852 (1999-06-01), Katayama et al.
patent: 5916454 (1999-06-01), Richardson et al.
patent: 6048798 (2000-04-01), Gadgil et al.
patent: 6103137 (2000-08-01), Park
patent: 6123791 (2000-09-01), Han et al.
patent: 6152070 (2000-11-01), Fairbairn et al.
patent: 6227140 (2001-05-01), Kennedy et al.
patent: 6312524 (2001-11-01), Ogawa et al.
patent: 6352611 (2002-03-01), Han et al.
patent: 6367411 (2002-04-01), Ogawa et al.
patent: 6388226 (2002-05-01), Smith et al.
patent: 6776873 (2004-08-01), Sun et al.
patent: 6805952 (2004-10-01), Chang et al.
patent: 2001/0003271 (2001-06-01), Otsuki
patent: 2002/0009560 (2002-01-01), Ozono
patent: 2002/0018921 (2002-02-01), Yamada et al.
patent: 2002/0086118 (2002-07-01), Chang et al.
patent: 2002/0177001 (2002-11-01), Harada et al.
patent: 9421671 (1996-07-01), None
patent: 1156130 (2001-11-01), None
patent: 2001164354 (2001-06-01), None
L. Pawlowski, The Science and Engineering of Thermal Spray Coatings, John Wiley, 1995.
Notification of Transmittal of the International Search Report or the Declaration dated Feb. 19, 2004 for PCT/US03/18502.
Written Opinion for PCT/US03/18502 dated Mar. 1, 2004.

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