Productivity enhancing thermal sprayed yttria-containing...

Details Productivity enhancing thermal sprayed yttria-containing... Productivity enhancing thermal sprayed yttria-containing...

2007-12-25

2007-12-25

Kackar, Ram N. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C156S345520, C156S345530, C118S724000, C118S725000, C118S726000, C204S298010

Reexamination Certificate

active

10180504

ABSTRACT:
Components of semiconductor processing apparatus comprise thermal sprayed yttria-containing coatings that provide erosion, corrosion and/or corrosion-erosion resistance in plasma atmospheres. The coatings can protect substrates from physical and/or chemical attack.

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