Radiation imagery chemistry: process – composition – or product th – Micrography – process – composition – or product other than...
Patent
1991-12-20
1995-01-24
Dote, Janis L.
Radiation imagery chemistry: process, composition, or product th
Micrography, process, composition, or product other than...
430296, 430313, 430314, 430323, 430324, 430325, 430326, 430330, 430946, 430966, 156628, 156643, G03F 736, G03F 738
Patent
active
053842200
ABSTRACT:
A method for the photolithographic production of structures in the submicron range including the following steps:
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"J. Electrochem. Soc.", vol. 136 (1989), pp. 1453-1456.
"Microelectronic Engineering", vol. 3 (1985), pp. 279-291.
"Mat. Res. Soc. Symp. Proc.", vol. 45 (1985), pp. 197-202.
"IBM Techn. Discl. Bull.", vol. 27, No. 4A (1984) p. 2197.
Ahne Hellmut
Birkle Siegfried
Borndoerfer Horst
Leuschner Rainer
Sebald Michael
Dote Janis L.
Siemens Aktiengesellschaft
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