Production of micromoldings having a high aspect ratio

Details Production of micromoldings having a high aspect ratio Production of micromoldings having a high aspect ratio

1992-03-06

1994-03-29

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430967, 430324, 264 25, G03F 730, G03C 516

Patent

active

052983676

ABSTRACT:
A process for the production of micromoldings having a high aspect ratio by imagewise irradiation of a polymer with high-energy, parallel radiation from an X-ray source employs, as the polymer, a copolymer comprising SO.sub.2 and one or more ethylenically unsaturated organic compounds.

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Methoden der organischen Chemi, vol. E20, Makromolekulare Stoffe, Part 2 (1987, 4th Edition, Georg Thieme Verlag, Stuttgart, p. 1468 ff. No Translation.

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