Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1993-08-05
1995-05-16
Rodee, Christopher D.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430324, 430967, 264 25, G03F 730
Patent
active
054159776
ABSTRACT:
A process for the production of micromoldings having a high aspect ratio by imagewise irradiation of a polymer with high-energy, parallel radiation from an X-ray source employs, as the polymer, a homo- or copolyoxymethylene.
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Hoessel Peter
Hoffmann Gerhard
Langen Juergen
Wuensch Thomas
BASF - Aktiengesellschaft
Rodee Christopher D.
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