Processing probe

Details Processing probe Processing probe

2008-05-27

2008-05-27

Vanore, David (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C977S855000

Reexamination Certificate

active

07378654

ABSTRACT:
A processing probe for repairing a defective portion in a sample has a cantilever and a probe separate and independent from the cantilever and integrally connected to an end portion of the cantilever for scratch-processing a defective portion of a sample. The cantilever and the probe are conductive for preventing the generation of electrostatic charges by friction of the probe against the sample during scratch-processing of the defective portion of the sample.

REFERENCES:
patent: 6197455 (2001-03-01), Yedur et al.
patent: 6328902 (2001-12-01), Hantschel et al.
patent: 6884999 (2005-04-01), Yedur et al.
“Optimization of Nanomachining Repair Conditions for ArF lithography”, Tsuyoshi Amano et al., Proceedings of SPIE, vol. 5256, pp. 538-545.
“Scanning Type of Probe Microscope, Foundation and Future Forecast”, Seizo Morita, Maruzen, published Feb. 10, 2000, pp. 21-24.
“Development of Atomic Force Microscope Integrated Type of Processing Evaluation Apparatus—Development of AFM Cantilever for Processing”, Kiwamu Ashida et al., Journal of the Japan Society for Abrasive Technology, vol. 41, No. 7, pp. 276-281, Jul. 1997.

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