Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-03-06
2007-03-06
Morgan, Eileen P. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S287000, C451S529000, C205S662000, C205S663000
Reexamination Certificate
active
10727774
ABSTRACT:
An electrochemical mechanical processing station having a zoned polishing pad assembly is provided. The zoned polishing pad assembly includes a conductive layer coupled to an upper layer having a non-conductive processing surface. At least two zones of different current permeability are defined across the processing surface of the upper layer. Each zone is defined by an attribute of the upper layer.
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Applied Materials Inc.
Morgan Eileen P.
Patterson & Sheridan
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