Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate
2008-04-08
2008-04-08
Norton, Nadine (Department: 1792)
Etching a substrate: processes
Gas phase etching of substrate
Etching inorganic substrate
C216S076000, C216S088000, C065S030140, C065S031000, C065S061000, C065S111000, C065S116000, C360S254000, C428S141000, C428S426000, C428S691000, C428S066600, C451S035000, C451S036000, C451S041000, C451S104000
Reexamination Certificate
active
10993422
ABSTRACT:
A processing method for glass substrate of the present invention includes: applying heat and external force to a glass substrate and then cooling it down to thereby form a compression stressed part having a different etching rate from that of other parts with respect to an etching reagent to be used, on the surface of the glass substrate and in the vicinity thereof, and performing chemical etching using the etching reagent on the glass substrate having the compression stressed part formed thereon, so as to form a relief on the surface of the glass substrate.
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Hidaka Takeshi
Hijino Masamichi
Kasai Hiroaki
Koyama Akihiro
Koyo Hirotaka
Angadi Maki
Hogan & Hartson LLP
Nippon Sheet Glass Co. Ltd.
Norton Nadine
Olympus Corporation
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