Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-12-02
1989-12-12
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118 501, 156345, B44C 122, C03C 1500, B05D 306, C23C 1400
Patent
active
048865702
ABSTRACT:
A process module having remote plasma and in situ plasma generators, a source of ultraviolet, and a radiant heater, which represent four separate energy sources. The four sources can be used singly or in any combination and can be separately controllable.
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patent: 3916822 (1975-11-01), Robinson
patent: 4615756 (1986-10-01), Tsujii et al.
patent: 4615905 (1986-10-01), Ovshinsky et al.
Lucovsky et al., "Deposition of Dielectric Films by Remote Plasma Enhanced CVD", Mat. Res. Soc. Symp. Proc., vol. 68, 1986, pp. 323-334.
Schmolla et al., "Amorphous BN Films Produced in a Double-Plasma Reactor for Semiconductor Applications", 205 Solid-State Electronics, vol. 26 (1983), Oct., No. 10, Exeter, Greate-Britain, pp. 931-939.
Davis Cecil J.
Hildenbrand Randall C.
Jones John I.
Jucha Rhett B.
Loewenstein Lee M.
Barndt B. Peter
Comfort James T.
Powell William A.
Sharp Melvin
Texas Instruments Incorporated
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