4. Coating processes
  5. Coating by vapor, gas, or smoke

Katsuya Fukae

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Cleaning gases and etching gases

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Processes and equipments for preparing F2-containing gases,...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2341473

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