Process of using high contrast photoresist developer with enhanc

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

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430302, 430309, G03F 726

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active

048227226

ABSTRACT:
High contrast, sensitivity and bath life is obtainable by the addition of inorganic salts, preferably a carbonate, to an aqueous alkali metal base containing a carboxylated surfactant. The preferred alkali metal bases are potassium hydroxide or sodium hydroxide. The carboxylated surfactants contemplated by the invention are those encompassed with the formula:

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patent: 4467027 (1984-08-01), Yamamoto et al.
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patent: 4670372 (1987-06-01), Lewis et al.
English Translation of West German Pat. No. 2,504,130, Fuji Photo., Published 8/1975, p. 1-22, 430-309.

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