Process of using an electrically conductive layer-providing comp

Details Process of using an electrically conductive layer-providing comp Process of using an electrically conductive layer-providing comp

1989-10-12

1991-05-28

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430270, 430271, 430273, 430311, 430325, G03C 500

Patent

active

050194852

ABSTRACT:
Electrically conductive layer-providing compositions comprising a conducting or semiconducting polymer and/or a non-conducting precursor thereof and a photo-acid generator having a sensitivity to an ultraviolet radiation having a wavelength of 300 nm or less. The electrically conductive layer, when an electron beam resist layer adjacent thereto is exposed to a pattern of the electron beam, can effectively prevent an accumulation of an electrical charge on the resist layer and accordingly a misalignment of the resist pattern. In addition, the compositions and electrically conductive layer resulting therefrom can be stably stored if not exposed to ultraviolet radiation. Pattern formation processes using the electrically conductive layer-providing compositions are also provided.

REFERENCES:
patent: 4935094 (1990-06-01), Mixon et al.
patent: 4939052 (1990-07-01), Nakagawa
patent: 4939070 (1990-07-01), Brunsvold et al.

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