Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-07-04
2006-07-04
Le, Thao P. (Department: 2818)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C257S288000
Reexamination Certificate
active
07071045
ABSTRACT:
A process of producing a thin film transistor includes forming a gate line on a substrate by first exposure and development processes. A source electrode, a drain electrode and a semiconductor channel are formed by second exposure and development processes. An island-shaped transistor is formed by third exposure and development processes. A protection layer with a contact hole therein is formed by fourth exposure and development processes. A pixel electrode is formed by fifth exposure and development processes to connect to the contact hole.
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Chang Jui-chung
Hsu Yi-Tsai
Kao Chin-Tzu
Wu Ying-Ming
Wu Yung-Hsin
Chunghwa Picture Tubes Ltd.
Le Thao P.
Rabin & Berdo P.C.
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