Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1993-08-19
1994-02-08
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430512, G03F 730, G03F 7023
Patent
active
052847373
ABSTRACT:
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective absorbance increasing amount of BLANKOPHOR FBW actinic dye; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
REFERENCES:
patent: 3525618 (1970-08-01), Keller et al.
patent: 3558316 (1971-01-01), Keberle et al.
patent: 3615551 (1971-10-01), Farnley
patent: 5001040 (1991-03-01), Blakeney et al.
Miles Product Information Sheet on Blankophor FBW, T.D.S. No. 1592/2 dated Mar., 1990.
Brzozowy David J.
Jayaraman Tripunithura V.
Bowers Jr. Charles L.
OCG Microelectronic Materials Inc.
Simons William A.
Young Christopher G.
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