Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1996-07-12
1998-07-28
Codd, Bernard P.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430326, 4302701, 430910, G03C 500, G03C 1492
Patent
active
057861315
ABSTRACT:
The present invention relates to a process for generating a resist image on a substrate utilizing a resist composition comprising (a) a radiation-sensitive acid generator, (b) a substituted androstane, and (c) a copolymer acrylate binder. The resist image is made using deep ultraviolet radiation.
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Allen Robert David
DiPietro Richard Anthony
Wallraff Gregory Michael
Codd Bernard P.
International Business Machines - Corporation
Martin Robert B.
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