Process for the purification of NF 3

Details Process for the purification of NF 3 Process for the purification of NF 3

2006-07-11

2006-07-11

Johnson, Edward M. (Department: 1754)

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

C423S241000, C423S239100

Reexamination Certificate

active

07074378

ABSTRACT:
This invention describes an improvement in a process for purifying a nitrogen trifluoride (NF3) stream containing unreacted F2, HF, and nitrogen oxides from an NF3reactor wherein the F2, and HF are removed and then the nitrogen oxides removed by adsorption. The improvement in the process resides in selectively removing the F2from said NF3stream without generating oxygen difluoride, removing HF and then removing said nitrogen oxides by adsorption. Further purification can be effected as desired.

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John T. Holmes, et al, Fluidized Bed Disposal of Fluorine, I&EC Process Design and Dev., 1967, vol. 6, No. 4, p. 408-413, no month.

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