Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1995-12-14
1997-09-02
Mosley, Terressa
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430 18, 525242, 525298, 525534, G03C 500
Patent
active
056630387
ABSTRACT:
A process for the preparation of phenolic resins having acid-labile acetal or ketal protecting groups by reacting a phenolic resin with an enol ether in the presence of an acidic catalyst and subsequently treating the reaction mixture with a basic anion exchanger gives heat-resistant polymers which, in combination with acid photogenerators, produce radiation-sensitive compositions of high processing stability with a greatly improved shelf life.
REFERENCES:
patent: 5356752 (1994-10-01), Cabrera et al.
European Search Report for European Patent Application EP 95 30 9071 dated Apr. 25, 1996.
Kirner Hans-Jorg
Mertesdorf Carl-Lorenz
Nathal Bertold
Mosley Terressa
OCG Microelectronic Materials Inc.
Simons William A.
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