Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1994-10-14
2000-04-18
Nelms, David
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
205123, 205125, H01L 2144
Patent
active
060514930
ABSTRACT:
A method which protects the region between a component and the substrate onto which the components is bonded using an electrically insulating fillet of photoresist. The fillet protects the regions from subsequent plating with metal and therefore shorting the plated conductors which run down the sides of the component and onto the substrate.
REFERENCES:
patent: 4594606 (1986-06-01), Goto
patent: 4624749 (1986-11-01), Black
patent: 4965646 (1990-10-01), Ipri
patent: 5098526 (1992-03-01), Bernhardt
Applied Surface Science 46 (1990) pp. 121-130, A.F. Bernhardt et al., "Multichip Packaging For Very-High-Speed Digital Systems", North-Holland Physics Publishing.
Bonde Wayne L.
Carey Paul G.
Contolini Robert J.
McCarthy Anthony M.
Tarte Lisa A.
Carnahan L. E.
Lebentritt Michael S.
Nelms David
The Regents of the University of California
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