Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1984-04-13
1985-12-03
Kittle, J. E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430315, 430316, 430317, 430319, 430329, 156643, G03C 500
Patent
active
045566283
ABSTRACT:
A process for producing printed circuit boards having metallic conductor structures embedded in the insulating substrate and whose front and back sides are conductively connected by means of plated through holes. The first steps of the process comprise producing a matrix on an epoxy resin substrate consisting of a lift-off layer, an aluminum barrier layer and a positive photoresist layer. A negative image of the desired conductor pattern is then generated in the photoresist layer using conventional photolithographic techniques. The negative image is etched into the barrier layer and the lift-off layer such that an undercut occurs under the barrier layer. Subsequently, vertical trenches are etched into the epoxy resin substrate. After drilling of the through holes, an activating layer of copper is deposited by means of magnetic field enhanced cathode sputtering on the surfaces of the trenches, the through holes and the barrier layer. The lift-off layer, together with the barrier layer covering it, is removed by immersion in a suitable solvent, and copper conductors are subsequently grown in the etched conductor trenches.
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Greschner Johann
Schwerdt Friedrich W.
Trumpp Hans J.
Abzug Jesse L.
Dees Jos,e G.
International Business Machines - Corporation
Kenemore Max J.
Kittle J. E.
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