Process for producing an integrated electronic circuit that...

Details Process for producing an integrated electronic circuit that... Process for producing an integrated electronic circuit that...

2006-04-25

2006-04-25

Kennedy, Jennifer (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S393000

Reexamination Certificate

active

07033887

ABSTRACT:
A process for producing an integrated electronic circuit that includes a capacitor comprises the formation of a stack on top of a substrate (100, 101). The stack comprises a first volume of a temporary material, a second volume (2) of at least one insulating dielectric and a third volume (3) of a first electrically conducting material. After a coating material (4) has been deposited on the stack, the temporary material is removed via access shafts (C1, C2) that are formed between a surface (S) of the circuit and the first volume. The temporary material is then replaced with a second, electrically conducting material.

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French Preliminary Search Report dated Apr. 16, 2004 for French Appl. No. 03 06031.

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