Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1985-02-19
1985-11-05
Brammer, Jack P.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430313, 430314, 430322, 430323, 430311, 156643, 1566591, 156904, G03C 500
Patent
active
045514186
ABSTRACT:
Negative relief images are generated by a process comprising the use of cationic polymerization and plasma etching.
REFERENCES:
patent: 4175963 (1979-11-01), Crivello
patent: 4307177 (1981-12-01), Crivello
patent: 4426247 (1984-01-01), Tamamura et al.
Hult Anders
Ito Hiroshi
MacDonald Scott A.
Willson Carlton G.
Brammer Jack P.
International Business Machines - Corporation
Walsh Joseph G.
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