Process for manufacturing a vibrating type transducer

Details Process for manufacturing a vibrating type transducer Process for manufacturing a vibrating type transducer

1989-10-20

1990-10-30

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

296211, 156628, 156653, 156657, 1566591, 156662, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

049666495

ABSTRACT:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.

REFERENCES:
patent: 4783237 (1988-11-01), Aine et al.
patent: 4849071 (1989-07-01), Evans
patent: 4895616 (1990-01-01), Higashi et al.
Petersen, "Micromechanical Voltage Controlled Switches and Circuits", 1978 International Electron Devices Meeting, 4-6 Dec. 1978.

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