Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1997-12-23
2000-08-15
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438234, H01L 218238
Patent
active
061035602
ABSTRACT:
Implantation of a high concentration of P type impurity in an emitter electrode can be prevented during forming a source-drain of PMOS and a extrinsic base, by keeping an insulating film intact only on an emitter electrode and simultaneously patterning the insulating electrode and a gate electrode, leading to prevention of increase and dispersion of an emitter resistance.
REFERENCES:
patent: 5026654 (1991-06-01), Tanba et al.
patent: 5089429 (1992-02-01), Hsu
patent: 5234847 (1993-08-01), Iranmanesh
NEC Corporation
Nguyen Tuan H.
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