Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Patent
1997-09-22
1999-09-07
Dang, Trung
Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Recessed oxide by localized oxidation
438289, 438449, 438530, H01L 2176
Patent
active
059500964
ABSTRACT:
In the fabrication of an integrated circuit, undesirable bird's beak pull back due to damage caused during ion implantation is alleviated by means of rapid thermal annealing step prior to chemical etching.
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patent: 5686346 (1997-11-01), Duane
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patent: 5861334 (1999-01-01), Rho
Huang Robert Y.S.
Hwang David Kou-Fong
Kuehne Stephen Carl
Lee Jean Ling
Liu Jane Qian
Dang Trung
Lucent Technologies - Inc.
Spivak Joel F.
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