Process for forming negative tone images of polyimides using bas

Details Process for forming negative tone images of polyimides using bas Process for forming negative tone images of polyimides using bas

1993-08-03

1994-05-10

Rodee, Christopher

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430311, 430330, 430283, G03C 556

Patent

active

053106253

ABSTRACT:
The present invention relates to an improved process for forming negative tone images of photosensitive polyimides on a substrate having improved wall angles.

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