Process for forming detailed images

Details Process for forming detailed images Process for forming detailed images

1985-04-16

1986-10-14

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430270, 430296, 430331, G03C 500

Patent

active

046172548

ABSTRACT:
A process for forming a detailed image having a high sensitivity to far-UV light and capable of giving a positive type image with a high precision is provided, which process comprises applying onto a base a resist solution comprising an organic solution, of a homopolymer of methyl vinyl ketone or a copolymer thereof with a comonomer of the formula R.sup.1 R.sup.2 C.dbd.CH.sub.2 wherein R.sup.1 is H or --CH.sub.3 and R.sup.2 is acetoxy, nitrile, unsubstituted or substituted aryl or ##STR1## wherein R.sup.3 is alkyl, to form a coating on the base; irradiating far-UV light; developing the coating with a developer composed mainly of a cellosolve compound; and rinsing or/and washing the resulting material.

REFERENCES:
patent: 4012536 (1977-03-01), Levine et al.
patent: 4018937 (1977-04-01), Levine et al.
patent: 4264715 (1981-04-01), Miura et al.
patent: 4302529 (1981-11-01), Lai
patent: 4394438 (1983-07-01), Van Pelt et al.
patent: 4401745 (1983-08-01), Nakane et al.

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