Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1987-01-27
1989-09-12
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430329, 430395, G03C 500, G03C 510
Patent
active
048659541
ABSTRACT:
The present invention provides a method for forming a metal image in which a resist film is provided at an image portion and then etching processing is performed to thereby form the metal image comprising the steps of: (1) forming an image comprised of concave surface portions on a metal surface; (2) forming a resist film on the metal surface; and (3) exposing the resist film to such an extent that at the concave portions of the resist film is not made wholly soluble.
REFERENCES:
patent: 4379833 (1983-04-01), Canavello et al.
Emori Kenji
Hagiwara Yoshichi
Kimura Naoya
Dees Jos,e G.
Kirn Walter N.
Minnesota Mining and Manufacturing Company
Neblett Adonis A.
Sell Donald M.
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