Process for fabricating thin film transistors

Details Process for fabricating thin film transistors Process for fabricating thin film transistors

2005-07-19

2005-07-19

Wilson, Christian (Department: 2829)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S166000, C438S486000, C438S487000

Reexamination Certificate

active

06919237

ABSTRACT:
A process for fabricating a semiconductor device including the steps of introducing into an amorphous silicon film, a metallic element which accelerates the crystallization of the amorphous silicon film, applying heat treatment to the amorphous silicon film to obtain a crystalline silicon film, irradiating a laser beam or an intense light to the crystalline silicon film, and heat treating the crystalline silicon film irradiated with a laser beam or an intense light.

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