Process for fabricating semiconductor device

Details Process for fabricating semiconductor device Process for fabricating semiconductor device

2005-06-24

2008-12-30

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S487000, C438S795000, C257SE21133, C257SE21134

Reexamination Certificate

active

07470575

ABSTRACT:
A process for fabricating a semiconductor device including the steps of: introducing into an amorphous silicon film, a metallic element which accelerates the crystallization of the amorphous silicon film; applying heat treatment to the amorphous silicon film to obtain a crystalline silicon film; irradiating a laser beam or an intense light to the crystalline silicon film; and heat treating the crystalline silicon film irradiated with a laser beam or an intense light.

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